The Semiconductor PFAS Consortium recently published a series of white papers on the uses of PFAS in the semiconductor industry. The papers identify the essential performance attributes of different PFAS chemistries in various applications in the semiconductor manufacturing process and semiconductor manufacturing equipment and infrastructure, as well as the significant technical challenges the industry faces in replacing these substances in these various applications. The white papers also consider workplace health and safety, in addition to environmental releases and controls.
The papers include:
- Background on Semiconductor Manufacturing and PFAS
- PFAS-Containing Surfactants Used in Semiconductor Manufacturing
- PFOS and PFOA Conversion to Short-Chain PFAS-Containing Materials Used in Semiconductor Manufacturing
- PFAS-Containing Photo-Acid Generators Used in Semiconductor Manufacturing
- PFAS-Containing Fluorochemicals Used in Semiconductor Manufacturing Plasma-Enabled Etch and Deposition
- PFAS-Containing Heat Transfer Fluids Used in Semiconductor Manufacturing
- PFAS-Containing Materials Used in Semiconductor Manufacturing Assembly Test Packaging and Substrate Processes
- PFAS-Containing Wet Chemistries Used in Semiconductor Manufacturing
- PFAS-Containing Lubricants Used in Semiconductor Manufacturing
- PFAS-Containing Articles Used in Semiconductor Manufacturing
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